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Study of RF Helical Cavity Discharge in Nitrogen, Argon and in Mixture of Nitrogen–Argon by Optical Emission Spectroscopy

By J. Krištof, V. Martišovitš, P. Veis, C. Foissac, C. Dupret and P. Supiot

Abstract

Abstract. This paper presents the spatial characterization of Ar-N2 plasma induced by a helical cavity excited at 27 MHz and moderated pressure (400 Pa). The axial profiles of densities and gas temperature are determined through the emissions of the first positive (1 +) and second positive (2 +) systems of N2. Additionally, in case of pure argon plasma, the OH(A 2 Σ + →X 2 Π) emission system coming from impurities is investigated. Rotational and vibrational temperatures profiles of the OH(A 2 Σ +) species are deduced by comparison of simulated and measured spectra. Investigation of 2 + and OH(A 2 Σ + →X 2 Π) emission systems shows the effect of excitation transfer between the impurities and Ar metastable atoms. The gas temperature values determined from 1 + emissions led to flat profile, which contrasts with hollow density profiles of the corresponding emitters, whatever the gas mixture considered here

Year: 2011
OAI identifier: oai:CiteSeerX.psu:10.1.1.186.6853
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