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On the use of an Oscillation-based Test Methodology for CMOS Micro-electro-mechanical Systems

By V. Beroulle, Y. Bertrand, L. Latorre and P. Nouet

Abstract

This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer

Year: 2002
OAI identifier: oai:CiteSeerX.psu:10.1.1.135.8880
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