Skip to main content
Article thumbnail
Location of Repository

On the use of an Oscillation-based Test Methodology for CMOS Micro-electro-mechanical Systems

By V. Beroulle, Y. Bertrand, L. Latorre and P. Nouet


This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer

Year: 2002
OAI identifier: oai:CiteSeerX.psu:
Provided by: CiteSeerX
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • (external link)
  • (external link)
  • Suggested articles

    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.