Skip to main content
Article thumbnail
Location of Repository

Proceedings of the 2004 Winter Simulation Conference

By R G. Ingalls, M. D. Rossetti, J. S. Smith and B. A. Peters

Abstract

A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity

Topics: CAPACITY ANALYSIS OF AUTOMATED MATERIAL HANDLING
Year: 2009
OAI identifier: oai:CiteSeerX.psu:10.1.1.135.6910
Provided by: CiteSeerX
Download PDF:
Sorry, we are unable to provide the full text but you may find it at the following location(s):
  • http://citeseerx.ist.psu.edu/v... (external link)
  • http://ieeexplore.ieee.org/iel... (external link)
  • Suggested articles


    To submit an update or takedown request for this paper, please submit an Update/Correction/Removal Request.