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Online available since 2006/Jan/15 Automatic Full-Field 3-D Profilometry Using White Light Confocal Microscopy with DMD-based Fringe Projection

By Liang-chia Chen, Wei-chieh Kao and Yao-ting Huang

Abstract

Abstract. A new full-field 3-D micro surface profilometer using digital micromirror device (DMD)-based fringe projection strategy and confocal principle is presented in the article. In viewing the fact that conventional laser confocal measurement method not only easily encounters undesired irregular scattering problems, but also lack scanning efficiency due to its single-point type measurement, the newly developed automatic surface profilometer deploys a DMD chip to project spatially encoded digital fringe patterns with dynamic light intensity, onto the object to obtain excellent measurement performance. A novel digital fringe pattern design with adaptive sinusoidal intensity modulation was developed for active fringe projection, to obtain optimized depth resolution with a micrometer lateral resolution in confocal measurement. Some of semiconductor components have been measured to attest the feasibility of the developed approach. The depth measurement resolution can reach better than 0.1µm and the maximal measured error was verified to be less than less than 0.5 % of the measured step size

Topics: Digital Micromirror Device (DMD, confocal microscopy, digital fringe projection, surface profilometry, 3-D measurement
Year: 2009
OAI identifier: oai:CiteSeerX.psu:10.1.1.135.1210
Provided by: CiteSeerX
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