Abstract: This paper presents a dynamic system modelling approach of a nanomanipulator chain developed by the ICA-ACROE and LEPES laboratories. The chain is a very complex instrument, serving for precise sensing and manipulation in nanometer scale environment. The objective is to find a suitable model of the chain in view of stability and performances analysis, and for further control design of the feedback loops. Such a global model is here developed using state space representation of the different parts of the chain. Moreover, an experimental modelling and identification of the cantilever parameters are presented. The nanoscale tip-sample interaction forces are modelled too. Finally the simulation of the whole nanomanipulation chain is performed, simulating the approach-withdrawal operation which is in good accordance with the real patterns of experiments in physics
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