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The interactions of molecular fluorine and xenon difluoride with silicon

By 1972- Matthew Richard Tate

Abstract

by Matthew Richard Tate.Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 1999.Includes bibliographical references

Topics: Chemistry.
Publisher: Massachusetts Institute of Technology
Year: 1999
OAI identifier: oai:dspace.mit.edu:1721.1/85293
Provided by: DSpace@MIT

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