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Performance of RF MEMS switches at low temperatures

By H.T. Su, I. Llamas-Garro, M.J. Lancaster, M. Prest, J.H. Park, J.M. Kim, C.W. Baek and Y.K. Kim


The actuation voltage of microelectromechanical system (MEMS) \ud metal switches was investigated at temperatures ranging from 10 to 290 K. The investigation shows a 50% increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature

Topics: TK Electrical engineering. Electronics Nuclear engineering
Publisher: Institution of Engineering and Technology
Year: 2006
DOI identifier: 10.1049/el:20062551
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