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Cryogenic Temperature Characterization of a 28-nm FD-SOI Dedicated Structure for Advanced CMOS and Quantum Technologies Co-Integration

By P. Galy, J. Camirand Lemyre, P. Lemieux, F. Arnaud, D. Drouin and Michel Pioro-Ladriere

Abstract

International audienc

Topics: [SDU]Sciences of the Universe [physics]
Publisher: 'Institute of Electrical and Electronics Engineers (IEEE)'
Year: 2018
DOI identifier: 10.1109/JEDS.2018.2828465
OAI identifier: oai:HAL:hal-01914251v1
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