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A New Atmospheric Pressure Plasma Deposition Process for Carbon and Titanium Thin Films Fabrication

By John Bell, Peter Fredericks, Emad Kiriakos (Izake), Thierry Paulmier and Claire Runge
Topics: 030601 Catalysis and Mechanisms of Reactions, 091299 Materials Engineering not elsewhere classified, Film Deposition, Gas Discharge, Carbon Films
Publisher: Institute of Materials Engineering Australasia Pty Ltd
Year: 2005
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