Closed-loop Modeling of Silicon Nanophotonics: From Design to Fabrication and Back Again (invited paper)

Abstract

We present a system for closed-loop modeling of silicon nanophotonics, where the properties of the fabrication process are taken into account in the design and optimization of nanophotonic components. Summary When fabricating nanophotonic components, several aspects come into play. There is the detailed electromagnetic simulation of the component, the generation of the mask layout, and the properties of the fabrication process which make that the fabricated structure is often not exactly identical to the one that was originally designed. We present a framework where all of these aspects are integrated in such a way that the properties of the fabrication can be taken into account during the design phase. The framework is held together with Python, a flexible programming language especially suitable fo