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Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing

By GM Pharr, DL Callahan, SD McAdams, TY Tsui, S Anders, A Anders, JW Ager, IG Brown, CS Bhatia, SRP Silva and J Robertson
Publisher: AMER INST PHYSICS
Year: 1996
DOI identifier: 10.1063/1.116530
OAI identifier: oai:epubs.surrey.ac.uk:2372

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