Graduation date: 2000With increasing operating frequencies in CMOS RF/microwave integrated circuits,\ud the performance of on-chip interconnects is becoming significantly affected by the lossy\ud substrate. It is the purpose of the first part of this thesis to develop a rigorous field\ud theoretic analysis approach for efficient characterization of single and multiple coupled\ud interconnects on silicon substrate, which is applicable over a wide range of substrate\ud resistivities. The frequency-dependent transmission line parameters of a microstrip on\ud silicon are determined by a new formulation based on a quasi-electrostatic and quasi-magnetostatic\ud spectral domain approach. It is demonstrated that this new quasi-static\ud formulation provides the complete frequency-dependent interconnect characteristics for\ud all three major transmission line modes of operation. In particular, it is shown that in the\ud case of heavily doped CMOS substrates, the distributed series inductance and series\ud resistance parameters are significantly affected by the presence of longitudinal substrate\ud currents giving rise to the substrate skin-effect. The method is further extended to\ud multiple coupled single and multi-level interconnect structures with ground plane and\ud multiple coupled co-planar stripline structures without ground plane. The finite conductor\ud thickness is taken into account in terms of a stacked conductor model. The new quasi-static\ud approach is validated by comparison with results obtained with a full-wave spectral\ud domain method and the commercial planar full-wave electromagnetic field solver\ud HP/Momentum®, as well as published simulation and measurement data.\ud In the second part of this thesis, coupled planar optical interconnect structures are\ud investigated based on a rigorous field theoretic analysis combined with an application of\ud the normal mode theory for coupled transmission lines. A new transfer matrix description\ud for a general optical directional coupler is presented. Based on this transfer matrix\ud formulation, the wavelength-dependent characteristics of multi-section optical filters\ud consisting of cascaded asymmetric optical directional coupler sections are investigated. It\ud is shown that by varying the asymmetry factors of the cascaded coupled waveguide\ud sections, optical wavelength filters with different passband properties can be achieved
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