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research
Study of mode transition in low pressure capacitive RF discharges in nitrogen
Authors
Dvořák Pavel
Kudrle Vít
Zajíčková Lenka
Šmíd Radek
Publication date
1 January 2002
Publisher
IOP AS CR
Abstract
We have studied the mode transition in low pressure capacitive RF discharges in nitroge
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Univerzitní repozitář Masarykovy univerzity
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Last time updated on 11/11/2016