CORE
🇺🇦
make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Ultra-high density carbon nanotubes on Al-Cu for advanced vias
Authors
,
,
+12 more
D Acquaviva
D Bouvet
B Capraro
J Dijon
CS Esconjauregui
M Fayolle
AM Ionescu
H Okuno
J Pontcharra
E Quesnel
J Robertson
T Vo
Publication date
1 December 2010
Publisher
Abstract
An integration scheme for carbon nanotube via interconnects is described to produce nanotube densities of 2.5 1012 tubes/cm2 or 8 1012 walls/cm2 on metallic Al-Cu lines, an order of magnitude beyond the previous state of art, and, for first time, close to that needed for implementation. ©2010 Crown
Similar works
Full text
Available Versions
CUED - Cambridge University Engineering Department
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:generic.eprints.org:261360...
Last time updated on 15/07/2020