(A)Study on developments and applications of novel notch-free and etch-hole-free processes on SiOG substrate for single crystak silicon comb actuator

Authors
Publication date
1 January 2003
Publisher
서울대학교 대학원

Abstract

학위논문(박사)--서울대학교 대학원 :전기. 컴퓨터공학부,2003.Docto

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