Deposition of conductive TiN shells on SiO2 nanoparticles with a fluidized bed ALD reactor

Authors
Publication date
Publisher
'Springer Science and Business Media LLC'
Doi

    Abstract

    Abstract is not available.

      Similar works

      Full text

      thumbnail-image

      Available Versions

      Crossref

      redirect
      oaiinfo:doi/10.1007%2Fs11051-016-...
      Last time updated on 03/12/2019