Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors

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Publication date
1 January 2001
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Abstract

Kleineberg U, Westerwalbesloh T, Wehmeyer O, et al. Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors. SPIE Proc. 4506. 2001:113-113

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