Abstract

<p>(A) Optical image of Au alignment markers and selected markers with enhanced contrast for coordinate analysis (red circles). (B) SEM image of same device as A and selected markers with enhanced contrast (red circles). (C) Residual error in <i>x</i> coordinate of SEM beam deflection (black circles) that scales linearly with the SEM <i>x</i> coordinate (red line). (D) Residual error (black circles) in SEM <i>y</i> coordinate scaling linearly with the SEM <i>y</i> coordinate (red line).</p

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