Beleggia, Marco

Han, Anpan

Tiddi, William

The invention relates to a method for creating an organic resist on a surface of a cooled substrate, the method comprising the steps of condensing a vapour into a solid film on the surface of the cooled substrate; patterning at least part of the solid film by exposing selected portions of said solid film to at least one electron beam thereby creating the organic resist on 5 the surface of the cooled substrate in accordance with a predetermined pattern; wherein the created organic resist remains essentially intact at ambient conditions; and using the created organic resist as a mask for creating semiconductor structures and/or semiconductor devices.</p

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A METHOD FOR CREATING STRUCTURES OR DEVICES USING AN ORGANIC ICE RESIST

http://orbit.dtu.dk/ws/files/140205353/WO2017191079A1.pdf

A METHOD FOR CREATING STRUCTURES OR DEVICES USING AN ORGANIC ICE RESIST

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