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Demonstration of TiO2 based ultra high-k (k=30) MIS capacitor and its electrical properties
Authors
ANJEHYUN
ROCK HYUN BAEK
KYEONG KEUN CHOI
BOHYEON KANG
Publication date
14 February 2020
Publisher
제 27회 반도체학술대회
Abstract
2
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포항공과대학교
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Last time updated on 11/01/2020