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State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes
Authors
J. Bisschop
A. de Boer
+9Â more
H.J.M. Geijselaers
M. Jansen
J.H.J. Janssen
F. Kuper
Y. Li
R.L. Schravendeel
W.D. van Driel
R.B.R. van Silfhout
G.Q. Zhang
Publication date
9 April 2001
Publisher
Abstract
Abstract is not available.
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Last time updated on 14/10/2017
University of Twente Research Information
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oai:ris.utwente.nl:publication...
Last time updated on 12/07/2023
