X-Ray Diffraction Characterization of Nanoscale Strains and Defects in Yttrium Iron Garnet Films Implanted with Fluorine Ions


The theoretical diffraction model for a crystalline multilayer system with inhomogeneous strain profile and randomly distributed defects has been created by using the statistical dynamical theory of X-ray diffraction in imperfect crystals. The dynamical scattering peculiarities in both coherent and diffuse scattering intensities have been taken into account for all the layers of the system by using derived recurrence relations between coherent scattering amplitudes. The investigated yttrium-iron garnet films grown on gadolinium-gallium garnet substrate were implanted with different doses of 90 keV F+ ions. The rocking curves measured from the as-grown and implanted samples have been treated by using the proposed theoretical model. This model has allowed for the reliable self-consistent determination of strain profile parameters and structural defect characteristics in both implanted film and substrate of the investigated samples

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