Hinf deflection control of a unimorph piezoelectric cantilever under thermal disturbance.

Abstract

International audienceThe effect of the temperature variation on a unimorph piezoelectric cantilever is studied. Its influences on the thermal expansion, the piezoelectric constant, the transient part and the creep are experimentally analyzed. Afterwards, a Hinf controller is synthesized in order ot reject the thermal disturbance and to reach performances required in micromanipulation. Finally, the closed-loop experiments end the paper