'Institute of Electrical and Electronics Engineers (IEEE)'
Doi
Abstract
International audienceThis paper presents a new hybrid micro-actuator based on the combination of piezoelectric and thermal effects. The proposed actuator can perform both a high stroke coarse positioning through the thermal actuation, and a high resolution fine positioning through the piezoelectric actuation. The micro-actuator structure is a unimorph piezoelectric cantilever, which also constitutes a thermal bimorph that is very sensitive to temperature variation. While electrical voltage is used to control the piezoelectric actuation, we use a Peltier module to provide the temperature variation and to control the thermal functioning. In order to understand the behavior of the hybrid actuator, a model is developped. For better precision but at the same time for model simplicity, the thermal part is modeled with the thermal network whereas the Prandtl-Ishlinskii hysteresis approach is used to model the nonlinearity of the piezoelectric part. Finally, a series of experimental results validate the developed model