thesis

SPM probe tips using heavily boron-doped silicon cantilevers realized in <110> bulk silicon wafer

Authors
Publication date
1 January 2000
Publisher
한국과학기술원

Abstract

학위논문(석사) - 한국과학기술원 : 전기및전자공학전공, 2000.2, [ iii, 60 p. ]한국과학기술원 : 전기및전자공학전공

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