Electronic and Chemical Analysis of a Metal-Insulator Interface Utilizing Transmission Electron Energy Loss Spectroscopy at 5Å Spatial Resolution

Abstract

AbstractUsing a 0.5 nm diameter probe of 100 keV electrons, we have been able to detect significant changes in the transmission electron energy loss spectra in the region of valence shell and L23 shell excitation within a spatial extent of 0.4 nm of an Al-AlF3 interface. The spectra have been recorded with a dose significantly less than the critical dose for destruction of the AlF3.</jats:p