This paper is concerned with the study of propagation of Rayleigh waves in a homogeneous isotropic generalized thermoelastic solid half space with mass diffusion in the context of the Lord–Shulman (Lord and Shulman. J. Mech. Phys. Solids. 15, 299 (1967)) and Green–Lindsay (Green and Lindsay. J. Elasticity. 2, 1 (1972)) theories of thermoelasticity. The medium is subjected to stress-free, isothermal, isoconcentrated boundary. After developing a mathematical model, the dispersion curve in the form of a polynomial equation is obtained. The roots of this polynomial equation are verified for not satisfying the original dispersion equation and therefore are filtered out and the remaining roots are checked with the property of decay with depth. Phase velocity and attenuation coefficient of the Rayleigh wave are computed numerically. The numerically simulated results are depicted graphically. The behavior of the particle motion is studied for the propagation of Rayleigh waves under Lord–Shulman model. Some special cases are also deduced from the present investigation. </jats:p