In e-beam evaporated amorphous silicon (a-Si), the densities of two-level
systems (TLS), n0 and P, determined from specific heat C
and internal friction Q−1 measurements, respectively, have been shown to
vary by over three orders of magnitude. Here we show that n0 and
P are proportional to each other with a constant of
proportionality that is consistent with the measurement time dependence
proposed by Black and Halperin and does not require the introduction of
additional anomalous TLS. However, n0 and P depend strongly
on the atomic density of the film (nSi) which depends on both film
thickness and growth temperature suggesting that the a-Si structure is
heterogeneous with nanovoids or other lower density regions forming in a dense
amorphous network. A review of literature data shows that this atomic density
dependence is not unique to a-Si. These findings suggest that TLS are not
intrinsic to an amorphous network but require a heterogeneous structure to
form