Meer, van der, M.

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 Production and characterisation of PVD titaniumcarbidecoatingsCitation for published version (APA):Meer, van der, M. (1996). Production and characterisation of PVD titaniumcarbide coatings. Poster sessionpresented at MaTe Poster Award 1996 : first annual poster contest.Document status and date:Published: 01/01/1996Document Version:Accepted manuscript including changes made at the peer-review stagePlease check the document version of this publication:• A submitted manuscript is the version of the article upon submission and before peer-review. There can beimportant differences between the submitted version and the official published version of record. Peopleinterested in the research are advised to contact the author for the final version of the publication, or visit theDOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and pagenumbers.Link to publicationGeneral rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright ownersand it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.            • Users may download and print one copy of any publication from the public portal for the purpose of private study or research.            • You may not further distribute the material or use it for any profit-making activity or commercial gain            • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the “Taverne” license above, pleasefollow below link for the End User Agreement:www.tue.nl/taverneTake down policyIf you believe that this document breaches copyright please contact us at:openaccess@tue.nlproviding details and we will investigate your claim.Download date: 08. Jul. 2024erialsaechnologyPRODUCTION AND CHARACTERISATION OFPVD TITANIUMCARBIDE COATINGSMichel van der MeerEindhoven University of Technology,Faculty of Mechanical Engineering,Section Materials Technology,P.O. Box 513, NL 5600 MB EindhovenIntroductionHard titaniumcarbide coatingscan be used for protecting ma-chine tools against abrasion andcorrosion and so extending thetools lifetime. In this work itis shown how to measure andchange the chemical composi-tion and mechanical properties oftitaniumcarbide coatings.ExperimentalThin layers of titaniumcarbide aredeposited on stainless steel sub-strates by unbalanced magnetronsputtering. The coatings aremade by the reaction of sputteredtitanium and acetylene in an ar-gon plasma. The acetylene flowis controlled by using a plasmaemission monitor (IPEM ).The chemical composition of thecoatings is determined by the en-forced gas flow. The mechanicalproperties of the coatings are de-termined by the applied bias volt-age.Coatings are chemically exam-ined by XPS, XRD and EPMA.The mechanical properties of thecoatings are examined by mea-suring the residual stresses andby determining coating failure inbulging and bending. The last twoin tensile condition.ResultsCoatings produced withIPEM=75% show to be stoichio-metric. Coatings produced withIPEM >75% also contain a in-creasing amount of Ti.70 75 80 85 90 95 100IPEM (%)0.01.02.03.04.05.06.0-40V-60V-80V-100V-150VResidual stress as a function of theenforced gas flow70 75 80 85 90 95 100IPEM (%)0.40.60.81.01.2-40V-60V-80V-100V-150VStrain to failure for bulging as afunction of the enforced gas flow70 75 80 85 90 95 100IPEM (%)0.00.51.01.52.0-40V-60V-80V-100V-150VStrain to failure for bending as afunction of the enforced gas flowIPEM 75% 80% 85% 90% 95%at%T i 59 60 71 71 95at%C 41 40 29 29 5[Ti][C]1.4 1.5 2.5 2.5 19DiscussionCoatings produced with values ofIPEM >75% contain free titaniumas well as titaniumcarbide. Takinginto acount that titanium is moreductile than titaniumcarbide, thisexplains the higher strains to fail-ure for higher values of IPEM .Since the direction of the appliedstresses in bending and bulgingare opposite to the direction of theresidual stress, it is expected thatthe strain to failure for bulging andbending will increase as the com-pressive residual stresses in thecoating will be higher. The figuresaffirm this.It is also evident that bias volt-ages of -80V, -100V and -150Vgive almost the same mechanicalbehaviour.Conclusions The production of stoichio-metric titaniumcarbide ispossible. The mechanical propertiescan be adjusted for a givenapplication. There is no use of apply-ing a more negative biasvoltage than -80V whenproducing titaniumcarbidecoatings.

Production and characterisation of PVD titaniumcarbide coatings

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Production and characterisation of PVD titaniumcarbide coatings

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