The usage of a spatial spectral domain integralequation solver for electromagnetic scattering from dielectricobjects provides a means to execute scattering simulationsfor lithography.We consider the extension of the localnormal vector field formulation to support polygonal buildingblocks in a Gabor series representation of functions.The usage of a spatial spectral domain integral equation solver for electromagnetic scattering from dielectric objects provides a means to execute scattering simulations for lithography. We consider the extension of the local normal vector field formulation to support polygonal building blocks in a Gabor series representation of functions
