Bijkerk, Fred

Louis, Eric

Nedelcu, Ileana

van de Kruijs, Robbert W.E.

Yakshin, Andrey E.

Undetermined

PROBLEM TO BE SOLVED: To provide a reflective optical element which maximizes reflectivity at operating wavelengths in the EUV or soft x-ray wavelength range.SOLUTION: In a multilayer reflective optical element, a first additional intermediate layer 23a, 23b and a second additional intermediate layer 24a, 24b are provided between an absorber layer 22 and a spacer layer 21, where the second additional intermediate layer 24a, 24b prevents chemical interaction between the first additional intermediate layer 23a, 23b and the adjoining spacer layer 21 and/or the absorber layer 22.</p

University of Twente Research Information

MULTILAYER REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY DEVICE COMPRISING FIRST AND SECOND ADDITIONAL INTERMEDIATE LAYERS

https://ris.utwente.nl/ws/files/329362704/JP2013219383A.pdf

MULTILAYER REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY DEVICE COMPRISING FIRST AND SECOND ADDITIONAL INTERMEDIATE LAYERS

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University of Twente Research Information