Bijkerk, F.

Stilhano Vilas Boas, Cristiane Regina

Sturm, J.M.

Zameshin, Andrey

English

Low energy ion scattering (LEIS) was employed in the analysis of Mo, Ru, Al and their oxides. Measurements with different He+ ion energies show that the characteristic neutralization velocities of the transition metals change when they bind to oxygen. However, such behavior was not observed for aluminum. We suggest that the existence of matrix effects in transition metal oxides is related to increase in neutralization by O 2s levels, which present are in (quasi-)resonance with He 1s. We further hypothesize that the matrix effect would not be observed in aluminum oxide due to changes in Auger neutralization from metal to oxidized form. This work provides a deeper understanding of the role of oxygen in low energy ion scattering analysis, granting tools for proper choice of reference samples and reliable quantification of surface elements by LEIS

University of Twente Research Information

Matrix effect in transition metal oxide formation: neutralization by O 2s levelsC. R. Stilhano Vilas Boasa, A. A. Zameshina,*, J. M. Sturma, F. BijkerkaaIndustrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The NetherlandsAbstractLow energy ion scattering (LEIS) was employed in the analysis of Mo, Ru, Al and their oxides. Measurements with different He+ ion energies show that the characteristic neutralization velocities of the transition metals change when they bind to oxygen. However, such behavior was not observed for  aluminum. We suggest that the existence of matrix effects in transition metal oxides is related to increase in neutralization by O 2s levels, which present are in (quasi-)resonance with He 1s. We further hypothesize that the matrix effect would not be observed in aluminum oxide due to changes in Auger neutralization from metal to oxidized form. This work provides a deeper understanding of the role of oxygen in low energy ion scattering analysis, granting tools for proper choice of reference samples and reliable quantification of surface elements by LEIS.  Keywords: Low Energy Ion Scattering, LEIS, Matrix effect, Transition Metal Oxides

Matrix effect in transition metal oxide formation:neutralization by O 2s levels

https://ris.utwente.nl/ws/files/171669145/LEIS2019_stilhano.docx

Matrix effect in transition metal oxide formation:neutralization by O 2s levels

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University of Twente Research Information