A SAW Delay Line Sensor Combined with Micro-hotplate for Bio-chemical Applications

Abstract

This paper presents a SAW delay line sensor for chemical and biological applications. The impulse response model is used for determination of IDT parameters and first order investigation. A three-dimensional finite element model of a SAW delay line on a silicon membrane with an AlN thin film is simulated. An additional micro-hotplate is combined with SAW system for thermal adjustment of sensing layer on required temperature and thermal stabilization for whole sensor. The designed SAW system works at 618 MHz with adequate wave confinement at the surface of the device. QUOTE S21 parameter and phase response of the sensor is calculated by applying an impulse signal to the sensor