Design and Simulation of RF MEMS Switch for Wireless Communication Applications

Abstract

In this paper, we have reported the design and analysis of a novel bulk-silicon fabricated RF MEMS capacitive switch. This RF switch has a short response time, low power consumption, and an IC compatible design. To lower the driving voltage and insertion loss, multiple geometries for the movable beam, membrane, and air gap are investigated using Software tool Comsol Multiphysics. Potential thermal stresses and deflection of the cantilever due to the application of forces have been investigated. Performance of the device under the application of forces also studied using the software