FIB Based Micro Fabrication Technique for a Novel Type of Scanning Electrochemical Microscopy Probes

Abstract

Scanning Electrochemical Microscopy is a powerful technique to obtain in situ information of a wide range of processes occurring at interfaces. However, one major drawback of this technique is the lack of high spatial resolution compared with AFM or STM, due to the interference of the currents originated by the topographical and the electrochemical effects, respectively. Hence, a simultaneous but independent sensing of both, the topographical and the electrochemical information with high spatial resolution is a major issue in the field of scanning electrochemical microscopy (SECM). In this paper, we present a Focused Ion Beam (FIB) based technology, which, for the first time, enables the realization of an independent, simultaneous sensing of both the topography and the electrochemically active interfac

    Similar works