4 research outputs found

    Low voltage electrostatic inchworm actuators in aqueous environments

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    AbstractA low-voltage, low-power electrostatic inchworm actuator integrated with a microneedle capable to operate in an aqueous environment is reported. The actuator provides ┬▒50┬Ám range, ┬▒195┬ÁN output force, and 1.1┬Ám average step size with only 11V operating voltage. Moreover, it consumes only dynamic power because of its electrostatic nature. This actuator is the state-of-the-art for low-voltage, low-power, large-range, and large-force applications to the best of our knowledge. A proper encapsulation is also achieved with a glass cap fabricated separately, and flip-chipped onto the actuator. Rendering the surfaces hydrophobic prevents the water ingress when the actuator operates in water