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3 research outputs found
Numerical Investigation of Reactive Species Generation in
H
e
/
O
2
He/O_2
He
/
O
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Admixture Capacitively Coupled Plasma
Author
A Farahat
A Fridman
+30 more
A Yang
AM Farahat
D Ellerweg
D Lee
DS Stafford
DX Liu
DX Liu
GJM Hagelaar
J He
J He
J Waskoenig
JY Jeong
K Matyash
K Niemi
K Ziane
KJ Taylor
M Thiyagarajan
N Balcon
S Harzheim
S Schröter
T Murakami
T Murakami
T Murakami
TJ Sommerer
V Léveillé
WS Kang
Y Inoue
Y Sakiyama
Z Donkó
Z Kechidi
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
Crossref
Influence of External Input Parameters on Species Production in a Dual-Frequency Capacitively Coupled Radio-frequency Oxygen Plasma
Author
AJ Lichtenberg
B Bora
+28 more
C Lee
CS Corr
DG Voloshin
DS Stafford
DX Liu
G Roberson
GA Curley
GJM Hagelaar
J Waskoenig
Jia Liu
JK Lee
JK Lee
JK Lee
JT Gudmundsson
JT Gudmundsson
JT Gudmundsson
JT Gudmundsson
JT Gudmundsson
K Bera
MA Lieberman
S Popović
Sakiyama Yukinori
SW Parada
T Gans
V Vahedi
X Xiang
Y Lu
Z Kechidi
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
Crossref
No full text
