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14 research outputs found

Growth of single-crystalline cobalt silicide nanowires and their field emission property

Author: AL Schmitt
AL Schmitt
AL Schmitt
B Xiang
Chi-Ming Lu
CI Tsai
CJ Kim
CL Hsin
Han-Fu Hsu
J Kim
J Kim
J Kim
JR Szczech
K Kang
K Seo
K Yamamoto
KC Lu
KC Lu
KSK Varadwaj
Kuo-Chang Lu
L Ouyang
LJ Chen
SC Hsu
SL Zhang
SL Zhang
WP Maszara
WW Wu
WW Wu
XQ Yan
Y Song
YH Liang
YL Chueh
YL Chueh
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

High Pressure Thermal Bonding for Sealing of Plastic Microstructures

Author: WP Maszara
Y Liu
Publication venue: 'Springer Science and Business Media LLC'
Publication date: 01/01/2002
Field of study

Perspectives of Simox Technology

Author: A Matsumura
AG Revesz
OW Holland
S Cristoloveanu
S Krause
S Nakashima
ST Liu
VV Afanasev
VV Afanasev
VV Afanasev
WP Maszara
Publication venue: 'Springer Science and Business Media LLC'
Publication date: 01/01/2002
Field of study

Interface layer effect on the stress distribution of a wafer-bonded bilayer structure

Author: C Gui
CE Murray
CQ Ru
E Suhir
E Suhir
HH Yu
IC Noyan
K Kendall
K Pinard
KN Chen
LB Freund
NJ Pagano
NJ Pagano
QY Tong
RB Pipes
RB Pipes
S Timoshenko
SM Hu
SM Hu
SS Wang
SS Wang
WG Lee
WP Maszara
WP Maszara
WT Chen
Y Zhang
Yin Zhang
ZL Liau
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

Surface pretreated low-temperature aluminum–aluminum wafer bonding

Author: Andreas P. Hinterreiter
B Rebhan
B Rebhan
Bernhard Rebhan
CH Yun
Christoph Flötgen
E Cakmak
J Evertsson
JR Lloyd
Kurt Hingerl
N Malik
N Malik
RK Hart
T Akatsu
T Akatsu
TE Volin
TH Kim
Viorel Dragoi
WP Maszara
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

Direct bonding of titanium layers on silicon

Author: CJ Smithells
E. Martinez
F Rieutord
F Rieutord
F. Baudin
H Okamoto
H. Moriceau
J Yu
J. Dechamp
JB Lasky
L Cioccio Di
L Fourdrinier
L. Di Cioccio
N. Chevalier
P Eyben
P Gueguen
P Wolf De
R Tadepalli
V. Delaye
WP Maszara
Y. Bréchet
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

A web-enabled open database system for design and manufacturing of micro-electro-mechanical systems (MEMS)

Author: C Su
DI Joshi
G Boothroyd
G Reese
GTA Kovacs
JB Lasky
JG Bralla
JM Bustillo
JW Judy
KE Petersen
M Shimbo
MA Schmit
SA Tadigadapa
SD Senturia
WD Calister
WP Maszara
WY Toh
XF Zha
XF Zha
XF Zha
XF Zha
Xuan F. Zha
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

Kinetics of low temperature direct copper–copper bonding

Author: A Roth
A Shigetou
B. Imbert
BT Khuri-Yakub
CS Tan
JG Ryan
K Holloway
K Kondo
KN Chen
KR Lawless
L Cioccio Di
L. Benaissa
M Martinez
M. Verdier
N Cabrera
P Gueguen
P. Gondcharton
R Nika
SH Kang
V. Carron
WP Maszara
Y Bertholet
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

Interface fracture surface energy of sol–gel bonded silicon wafers by three-point bending

Author: A Plößl
AJ Atanacio
AJ Phillipps
B. A. Latella
BA Latella
C Angelelis
CJ Barbe
CJ Barbe
CJ Barbé
E Harry
J Steinkirchner
JW Hutchinson
M Andrieux
M Ignat
M. Ignat
O Vallin
PG Charalambides
Q-Y Tong
SN Farrens
U Gosele
W Kern
WP Maszara
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

Technological aspects of a new micro-electro-mechanical actuation principle: nano-e-drive

Author: B. Kaiser
C Chung
CH Nathanson
CM Waits
D Elata
D Oner
DJ Bell
F Walther
H Conrad
H Jansen
H. Conrad
H. Schenk
IW Rangelow
J Kuehn
JU Schmidt
K Biswas
K. Schimmanz
LM Landsberger
M. Gaudet
M. Stolz
P Pal
PJ Kelly
R Ghodssi
S. Langa
S. Uhlig
SA Gosalvez
SD Hersee
SM George
VI Kolkovsky
W-M Zhang
WJ Zhang
WP Eaton
WP Maszara
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

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