26 research outputs found
The application of low energy accelerators to analysis problems
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MeV-ion beam analysis of the interface between filtered cathodic arc-deposited a-carbon and single crystalline silicon
Amorphous carbon (a-C) films were deposited on Si(100) wafers by a filtered cathodicvacuum arc (FCVA) plasma source. A negative electrical bias was applied tothe silicon substrate in order to control the incident energy of carbon ions. Effects ofthe electrical bias on the a-C/Si interface characteristics were investigated by usingstandard Rutherford backscattering spectrometry (RBS) in the channeling modewith 2.1-MeV He2+ ions. The shape of the Si surface peaks of the RBS/channelingspectra reflects the degree of interface disorder due to atomic displacement fromthe bulk position of the Si crystal. Details of the analysis method developed aredescribed. It was found that the width of the a-C/Si interface increases linearlywith the substrate bias voltage but not the thickness of the a-C film
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Optical emission spectra of a copper plasma produced by a metal vapor vacuum arc source
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