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1 research outputs found
State-of-the-Art on Thermo-Mechanical Modelling of IC Back-End Processes
Author
Bisschop J.
de Boer A.
+9Â more
Geijselaers H.J.M.
Jansen M.
Janssen J.H.J.
Kuper F.
Li Y.
Schravendeel R.L.
van Driel W.D.
van Silfhout R.B.R.
Zhang G.Q.
Publication venue
Publication date
09/04/2001
Field of study
No full text
University of Twente Research Information