Roentgenempfindliche Polymere fuer die Mikromechanik

Poly(lactide-co-glycolide) with a lactide/glycolide ratio of 90:10 is proposed as a new efficient roentgen resist for the LIGA process. The newly developed laminate, consisting of this resit material, 500 nm carbon primer layer and an 8 mm thick copper piece, proved to be superior to the standard LIGA laminate. Additional developments in the field of LIGA technique include a novolak-based negative resist for deep-etch synchrotron radiation litography and an external primer for the polymethylmethacrylate standard resist. (WEN)SIGLEAvailable from TIB Hannover: F95B1203+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman