The effect of chrome adhesion layer on quartz resonator aging.

This SAND report documents a late start LDRD designed to determine the possible aging effects of a quartz resonator gold adhesion layer. Sandia uses quartz resonators for applications. These applications require a very stable frequency source with excellent aging (low drift) characteristics. These parts are manufactured by one of our qualified vendors outside Sandia Laboratories, Statek Corp. Over the years we, Sandia and the vendor, have seen aging variations that have not been completely explained by the typical mechanisms known in the industry. One theory was that the resonator metallization may be contributing to the resonator aging. This LDRD would allow us to test and analyze a group of resonators with known differentiating metallization and via accelerated aging determine if a chrome adhesion layer used to accept the final gold plating may contribute to poor aging. We worked with our main vendor to design and manufacture a set of quartz resonators with a wide range of metallization thickness ratios between the chrome and gold that will allow us determine the cause of this aging and which plating thickness ratios provide the best aging performance while not degrading other key characteristics

LDRD 140639 final report : investigation of transmutation claims.

The Proton-21 Laboratory in the Ukraine has been publishing results on shock-induced transmutation of several elements, including Cobalt 60 into non-radioactive elements. This report documents exploratory characterization of a shock-compressed Aluminum-6061 sample, which is the only available surrogate for the high-purity copper samples in the Proton-21 experiments. The goal was to determine Sandia's ability to detect possible shock-wave-induced transmutation products and to unambiguously validate or invalidate the claims in collaboration with the Proton-21 Laboratory. We have developed a suitable characterization process and tested it on the surrogate sample. Using trace elemental analysis capabilities, we found elevated and localized concentrations of impurity elements like the Ukrainians report. All our results, however, are consistent with the ejection of impurities that were not in solution in our alloy or were deposited from the cathode during irradiation or possibly storage. Based on the detection capabilities demonstrated and additional techniques available, we are positioned to test samples from Proton-21 if funded to do so

Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS).

Qualification of microsystems for weapon applications is critically dependent on our ability to build confidence in their performance, by predicting the evolution of their behavior over time in the stockpile. The objective of this work was to accelerate aging mechanisms operative in surface micromachined silicon microelectromechanical systems (MEMS) with contacting surfaces that are stored for many years prior to use, to determine the effects of aging on reliability, and relate those effects to changes in the behavior of interfaces. Hence the main focus was on 'dormant' storage effects on the reliability of devices having mechanical contacts, the first time they must move. A large number ({approx}1000) of modules containing prototype devices and diagnostic structures were packaged using the best available processes for simple electromechanical devices. The packaging processes evolved during the project to better protect surfaces from exposure to contaminants and water vapor. Packages were subjected to accelerated aging and stress tests to explore dormancy and operational environment effects on reliability and performance. Functional tests and quantitative measurements of adhesion and friction demonstrated that the main failure mechanism during dormant storage is change in adhesion and friction, precipitated by loss of the fluorinated monolayer applied after fabrication. The data indicate that damage to the monolayer can occur at water vapor concentrations as low as 500 ppm inside the package. The most common type of failure was attributed to surfaces that were in direct contact during aging. The application of quantitative methods for monolayer lubricant analysis showed that even though the coverage of vapor-deposited monolayers is generally very uniform, even on hidden surfaces, locations of intimate contact can be significantly depleted in initial concentration of lubricating molecules. These areas represent defects in the film prone to adsorption of water or contaminants that can cause movable structures to adhere. These analysis methods also indicated significant variability in the coverage of lubricating molecules from one coating process to another, even for identical processing conditions. The variability was due to residual molecules left in the deposition chamber after incomplete cleaning. The coating process was modified to result in improved uniformity and total coverage. Still, a direct correlation was found between the resulting static friction behavior of MEMS interfaces, and the absolute monolayer coverage. While experimental results indicated that many devices would fail to start after aging, the modeling approach used here predicted that all the devices should start. Adhesion modeling based upon values of adhesion energy from cantilever beams is therefore inadequate. Material deposition that bridged gaps was observed in some devices, and potentially inhibits start-up more than the adhesion model indicates. Advances were made in our ability to model MEMS devices, but additional combined experimental-modeling studies will be needed to advance the work to a point of providing predictive capability. The methodology developed here should prove useful in future assessments of device aging, however. Namely, it consisted of measuring interface properties, determining how they change with time, developing a model of device behavior incorporating interface behavior, and then using the age-aware interface behavior model to predict device function

The effect of chrome adhesion layer on quartz resonator aging.

This SAND report documents a late start LDRD designed to determine the possible aging effects of a quartz resonator gold adhesion layer. Sandia uses quartz resonators for applications. These applications require a very stable frequency source with excellent aging (low drift) characteristics. These parts are manufactured by one of our qualified vendors outside Sandia Laboratories, Statek Corp. Over the years we, Sandia and the vendor, have seen aging variations that have not been completely explained by the typical mechanisms known in the industry. One theory was that the resonator metallization may be contributing to the resonator aging. This LDRD would allow us to test and analyze a group of resonators with known differentiating metallization and via accelerated aging determine if a chrome adhesion layer used to accept the final gold plating may contribute to poor aging. We worked with our main vendor to design and manufacture a set of quartz resonators with a wide range of metallization thickness ratios between the chrome and gold that will allow us determine the cause of this aging and which plating thickness ratios provide the best aging performance while not degrading other key characteristics

LDRD 140639 final report : investigation of transmutation claims.

The Proton-21 Laboratory in the Ukraine has been publishing results on shock-induced transmutation of several elements, including Cobalt 60 into non-radioactive elements. This report documents exploratory characterization of a shock-compressed Aluminum-6061 sample, which is the only available surrogate for the high-purity copper samples in the Proton-21 experiments. The goal was to determine Sandia's ability to detect possible shock-wave-induced transmutation products and to unambiguously validate or invalidate the claims in collaboration with the Proton-21 Laboratory. We have developed a suitable characterization process and tested it on the surrogate sample. Using trace elemental analysis capabilities, we found elevated and localized concentrations of impurity elements like the Ukrainians report. All our results, however, are consistent with the ejection of impurities that were not in solution in our alloy or were deposited from the cathode during irradiation or possibly storage. Based on the detection capabilities demonstrated and additional techniques available, we are positioned to test samples from Proton-21 if funded to do so

Comparison of Mg-based liquid metal ion sources for scalable focused-ion-implantation doping of GaN

We compare the suitability of various magnesium-based liquid metal alloy ion sources (LMAISs) for scalable focused-ion-beam (FIB) implantation doping of GaN. We consider GaMg, MgSO4●7H2O, MgZn, AlMg, and AuMgSi alloys. Although issues of oxidation (GaMg), decomposition (MgSO4●7H2O), and excessive vapor pressure (MgZn and AlMg) were encountered, the AuMgSi alloy LMAIS operating in a Wien-filtered FIB column emits all Mg isotopes in singly and doubly charged ionization states. We discuss the operating conditions to achieve <20 nm spot size Mg FIB implantation and present Mg depth profile data from time-of-flight secondary ion mass spectrometry. We also provide insight into implantation damage and recovery based on cathodoluminescence spectroscopy before and after rapid thermal processing. Prospects for incorporating the Mg LMAIS into high-power electronic device fabrication are also discussed

Predicting fracture in micron-scale polycrystalline silicon MEMS structures.

Designing reliable MEMS structures presents numerous challenges. Polycrystalline silicon fractures in a brittle manner with considerable variability in measured strength. Furthermore, it is not clear how to use a measured tensile strength distribution to predict the strength of a complex MEMS structure. To address such issues, two recently developed high throughput MEMS tensile test techniques have been used to measure strength distribution tails. The measured tensile strength distributions enable the definition of a threshold strength as well as an inferred maximum flaw size. The nature of strength-controlling flaws has been identified and sources of the observed variation in strength investigated. A double edge-notched specimen geometry was also tested to study the effect of a severe, micron-scale stress concentration on the measured strength distribution. Strength-based, Weibull-based, and fracture mechanics-based failure analyses were performed and compared with the experimental results