Inspection strategy for LIGA microstructures using a programmable optical microscope.

The LIGA process has the ability to fabricate very precise, high aspect ratio mesoscale structures with microscale features [l]. The process consists of multiple steps before a final part is produced. Materials native to the LIGA process include metals and photoresists. These structures are routinely measured for quality control and process improvement. However, metrology of LIGA structures is challenging because of their high aspect ratio and edge topography. For the scale of LIGA structures, a programmable optical microscope is well suited for lateral (XU) critical dimension measurements. Using grayscale gradient image processing with sub-pixel interpolation, edges are detected and measurements are performed. As with any measurement, understanding measurement uncertainty is necessary so that appropriate conclusions are drawn from the data. Therefore, the abilities of the inspection tool and the obstacles presented by the structures under inspection should be well understood so that precision may be quantified. This report presents an inspection method for LIGA microstructures including a comprehensive assessment of the uncertainty for each inspection scenario