Fabrication of Surface Micromachined AlN Piezoelectric Microstructures and its Potential Apllication to RF Resonators

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive sputtering. The top Cr layer is used both as a mask to etch the AlN thin films and as an electrode to actuate the AlN piezoelectric layer. The AlN layer is patterned anisotropically by wet etching using a TMAH (25%) solution. This multilayer stack uses silicon-di-oxide as a sacrificial layer to make free-standing structures. One-port scattering paramenter measurement using a network analyzer show a resonant frequency of 1.781 GHz on a clamped-clamped beam suspended structure. The effective electromechanical coupling factor is calculated as 2.4 % and the measured bandwidth is 13.5 MHz for one such a doubly clamped beam (990x30) μm2

Cascading nonlinearities in an organic single crystal core fiber: The Cerenkov regime

The large nonlinear phase shifts imparted to the fundamental beam during Cerenkov second harmonic generation (SHG) in a DAN, 4-(N,N-dimethylamino)-3-acetamidonitrobenzene, single crystal core fiber are explained and modelled numerically. Cascading upconversion and downconversion processes leads to nonlinear phase shifts produced by the second order nonlinear coupling of the guided fundamental mode and the component of the Cerenkov second harmonic field trapped in the fiber cladding

Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever

The principle, fabrication and characterization of a dielectric MEMS cantilever located a few 100 nm above a racetrack ring resonator are presented. After fabrication of the resonators on silicon-on-insulator (SOI) wafers in a foundry process, the cantilevers were integrated by surface micromachining techniques. Off-state deflections of the cantilevers have been optimized to appropriately position them near the evanescent field of the resonator. Using electrostatic actuation, moving the cantilevers into this evanescent field, the propagation properties of the ring waveguide are modulated. We demonstrate 122 pm tuning of the resonance wavelength of the optical ring resonator (in the optical C-band) without change of the optical quality factor, on application of 9 V to a 40 µm long cantilever. This compact integrated device can be used for tuning/switching a specific wavelength, with very little energy for operation and negligible cross talk with surrounding device

Clinical DRUJ instability does not influence the long-term functional outcome of conservatively treated distal radius fractures

Trauma Surger

MEMS based hair flow-sensors as model systems for acoustic perception studies

Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance

Connection, September/October 1998

Research Findings: The current study examined the use of a newly developed instrument for measuring parental literacy beliefs in a highly diverse urban Dutch sample of 35 parents, participating in a family literacy program. The instrument was used to explore a new conceptualization of parental literacy beliefs and associations between beliefs and parental demographic characteristics. Data were analyzed using both quantitative and qualitative techniques. The instrument revealed that parents in this sample preferred meaning-oriented and facilitative practices to stimulate their children’s literacy development, in which understanding the meaning of language and print is seen as the starting point in literacy development and in which teaching occurs indirectly, in an embedded child-centered approach. Parental preferences were associated with a variety of beliefs. Parents who did not speak Dutch, the majority language, with their children were more inclined toward directly instructing their children compared to parents who did speak Dutch with their children. The instrument proved to be effective in exposing the nature of and nuances in parental literacy beliefs in a diverse sample. Practice or Policy: Our newly developed instrument can be used by professionals working with family literacy programs to gain insight into the literacy beliefs of diverse groups of parents