1,037 research outputs found
Plasma-Enhanced and Thermal ALD of Al₂O₃ from Dimethylaluminium Isopropoxide, [Al(CH₃)₂(µ-OⁱPr)]₂
GluR1 links structural and functional plasticity at excitatory synapses
Long-term potentiation (LTP), a cellular model of learning and memory, produces both an enhancement of synaptic function and an increase in the size of the associated dendritic spine. Synaptic insertion of AMPA receptors is known to play an important role in mediating the increase in synaptic strength during LTP, whereas the role of AMPA receptor trafficking in structural changes remains unexplored. Here, we examine how the cell maintains the correlation between spine size and synapse strength during LTP. We found that cells exploit an elegant solution by linking both processes to a single molecule: the AMPA-type glutamate receptor subunit 1 (GluR1). Synaptic insertion of GluR1 is required to permit a stable increase in spine size, both in hippocampal slice cultures and in vivo. Synaptic insertion of GluR1 is not sufficient to drive structural plasticity. Although crucial to the expression of LTP, the ion channel function of GluR1 is not required for the LTP-driven spine size enhancement. Remarkably, a recombinant cytosolic C-terminal fragment (C-tail) of GluR1 is driven to the postsynaptic density after an LTP stimulus, and the synaptic incorporation of this isolated GluR1 C-tail is sufficient to permit spine enlargement even when postsynaptic exocytosis of endogenous GluR1 is blocked. We conclude that during plasticity, synaptic insertion of GluR1 has two functions: the established role of increasing synaptic strength via its ligand-gated ion channel, and a novel role through the structurally stabilizing effect of its C terminus that permits an increase in spine size
Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
The reaction mechanisms of plasma-assisted atomic layer deposition (ALD) of TaNx using Ta(NMe2)5 were studied using quadrupole mass spectrometry (QMS). The fact that molecule dissociation and formation in the plasma have to be considered for such ALD processes was illustrated by the observation of 4% NH3 in a H2-N2 (1:1) plasma. Using QMS measurements the reaction products during growth of conductive TaNx using a H2 plasma were determined. During the Ta(NMe2)5 exposure the reaction product HNMe2 was detected. The amount of adsorbed Ta(NMe2)5 and the amount of HNMe2 released were found to depend on the number of surface groups generated during the plasma step. At the beginning of the plasma exposure step the molecules HNMe2, CH4, HCN, and C2H2 were measured. After an extended period of plasma exposure, the reaction products CH4 and C2H2 were still present in the plasma. This change in the composition of the reaction products can be explained by an interplay of aspects including the plasma-surface interaction, the ALD surface reactions, and the reactions of products within the plasma. The species formed in the plasma (e.g., CHx radicals) can re-deposit on the surface and influence to a large extent the TaNx material composition and propertie
New, Non-Pyrophoric Al-Precursor for the ALD of Al₂O₃: Influence of Purity Grade on Silicon Surface Passivation
Low-temperature deposition of TiN by plasma-assisted atomic layer deposition
Titanium nitride (TiN) films were deposited by a plasma-assisted at. layer deposition (PA-ALD) process, based on TiCl4 precursor dosing and remote H2-N2 plasma exposure, at temps. ranging from 100 to 400 DegC. The plasma, the PA-ALD process, and the resulting TiN material properties were extensively investigated. The plasma was studied by optical emission spectroscopy and Langmuir probe, revealing an ion d. of 109 cm-3 and an electron temp. of 3.5 eV just above the substrate. Under floating conditions there is thus a considerable ion flux towards the substrate per ALD cycle with a typical ion energy of .apprx.15 eV. TiN film growth was studied by in situ spectroscopic ellipsometry, revealing self-limiting surface reactions for the complete temp. range. At 100 DegC the growth rate of 0.3 A/cycle was found to be significantly lower than the growth rate of 0.6 A/cycle at 400 DegC. The stoichiometry of the films varied with the plasma exposure time, while the Cl content was mostly affected by the deposition temp. (2.1 atom % at 100 DegC to 0.07 atom % at 400 DegC). Resistivities as low as 71 mW cm were obtained at a temp. of 400 DegC, while at 100 DegC a fair resistivity of 209 mW cm was reached. These results show that PA-ALD with TiCl4 and H2-N2 plasma is well suited for low-temp. deposition of high-quality TiN films. [on SciFinder (R)
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