3 research outputs found
Monte Carlo Simulation of Sinusoidally Modulated Superlattice Growth
The fabrication of ZnSe/ZnTe superlattices grown by the process of rotating
the substrate in the presence of an inhomogeneous flux distribution instead of
successively closing and opening of source shutters is studied via Monte Carlo
simulations. It is found that the concentration of each compound is
sinusoidally modulated along the growth direction, caused by the uneven arrival
of Se and Te atoms at a given point of the sample, and by the variation of the
Te/Se ratio at that point due to the rotation of the substrate. In this way we
obtain a ZnSeTe alloy in which the composition varies
sinusoidally along the growth direction. The period of the modulation is
directly controlled by the rate of the substrate rotation. The amplitude of the
compositional modulation is monotonous for small angular velocities of the
substrate rotation, but is itself modulated for large angular velocities. The
average amplitude of the modulation pattern decreases as the angular velocity
of substrate rotation increases and the measurement position approaches the
center of rotation. The simulation results are in good agreement with
previously published experimental measurements on superlattices fabricated in
this manner