Optimisation and characterisation of durable microelectrodes for electroanalysis in molten salt

This work presents microfabricated microelectrodes, capable of quantitative analysis in molten salt (MS). MSs are an electrolytic medium of growing interest, especially in the area of nuclear reprocessing. However, designing sensors for a MS-based nuclear reprocessing system is a challenge, owing to the usually corrosive nature and high operating temperatures (typically 450 - 500◦C) of MS. Microelectrodes are well placed as sensors, with numerous advantages over macro-scale electrodes. As a consequence, there have been previous attempts to utilise microelectrodes inMS. However, these have not been successful and all have suffered disadvantages inherent in traditional microelectrode manufacturing. The microelectrodes presented in this work were produced using standard microfabrication techniques and characterised in MS. An analysis of failure mechanisms guided a systematic study of material combinations. This resulted in a sensor, which is capable of delivering quantifiable electrochemistry in MS. However, the lifetime and yield of the sensor were determined to only be 46% and 1.4 hours respectively. Further investigation of the microelectrode failure mechanisms guided several layout changes to the microelectrode design. By reducing critical area, where defects or pinholes could form, these resulted in improvements in performance. This increased the yield to 65%, while the average lifetime increased up to 45 hours. Test structures were designed to investigate the causes of the continued microelectrode failures and identified shorting between the electrode metal and silicon substrate. This suggests the existence of defects in the underlying insulator are the cause of the 35% of microelectrodes which never functioned. Separate test structures suggested the lifetimes of the microelectrodes could also be improved by removing the need for a metal adhesion layer. Tantalum has been suggested as a replacement electrode metal and a proof of concept study demonstrated the feasibility of employing thin film tantalum as an electrode metal in LKE. Using this technology as a platform, several proof-of-concept microelectrode designs are also presented: liquid microelectrodes, microelectrode arrays, and a nanoelectrode. These are targeted at specific sensing applications, and provide an expanded spectrum of measurements in MS

Wirbelstrombasierte Formmessung an metallischen Halbzeugen

Wirbelströme werden in der Mess- und Sensortechnik sehr erfolgreich benutzt, um berührungslos Risse und Abstände metallischer Halbzeuge zu bestimmen. Die Messung von Konturen ist mit diesem industrietauglichen Wirkprinzip bisher nicht realisiert worden. Hier werden häufig optische Messsysteme eingesetzt. Speziell bei glühenden Werkstücken oder bei Benetzung der Halbzeuge mit Bohremulsionen und Schneidölen steigt der Aufwand für den Einsatz optischer Systeme stark an. Messverfahren, die auf hochfrequenten Wirbelströmen basieren, sind aufgrund ihrer einfachen Aufbauten deutlich robuster und somit besser für diese Anwendung geeignet. Voruntersuchungen zeigten, dass mit dieser Methode schon kleine Geometrieabweichungen des Walzgutes von wenigen Mikrometern detektiert werden können. In diesem Beitrag werden zwei Möglichkeiten zur Messung der spektralen Impedanzbeeinflussung eines Messschwingkreises durch die Wirbelströme im Werkstück gegenübergestellt

Nanoscale electrode arrays produced with microscale lithographic techniques for use in biomedical sensing applications

A novel technique for the production of nanoscale electrode arrays that uses standard microfabrication processes and micron-scale photolithography is reported here in detail. These microsquare nanoband edge electrode (MNEE) arrays have been fabricated with highly reproducible control of the key array dimensions, including the size and pitch of the individual elements and, most importantly, the width of the nanoband electrodes. The definition of lateral features to nanoscale dimensions typically requires expensive patterning techniques that are complex and low-throughput. However, the fabrication methodology used here relies on the fact that vertical dimensions (i.e. layer thicknesses) have long been manufacturable at the nanoscale using thin film deposition techniques that are well established in mainstream microelectronics. The authors report for the first time two aspects that highlight the particular suitability of these MNEE array systems for probe monolayer biosensing. The first is simulation, which shows the enhanced sensitivity to the redox reaction of the solution redox couple. The second is the enhancement of probe film functionalisation observed for the probe film model molecule, 6-mercapto-1-hexanol compared with microsquare electrodes. Such surface modification for specific probe layer biosensing and detection is of significance for a wide range of biomedical and other sensing and analytical applications.</p

Nanoscale electrode arrays produced with microscale lithographic techniques for use in biomedical sensing applications

A novel technique for the production of nanoscale electrode arrays that uses standard microfabrication processes and micron-scale photolithography is reported here in detail. These microsquare nanoband edge electrode (MNEE) arrays have been fabricated with highly reproducible control of the key array dimensions, including the size and pitch of the individual elements and, most importantly, the width of the nanoband electrodes. The definition of lateral features to nanoscale dimensions typically requires expensive patterning techniques that are complex and low-throughput. However, the fabrication methodology used here relies on the fact that vertical dimensions (i.e. layer thicknesses) have long been manufacturable at the nanoscale using thin film deposition techniques that are well established in mainstream microelectronics. The authors report for the first time two aspects that highlight the particular suitability of these MNEE array systems for probe monolayer biosensing. The first is simulation, which shows the enhanced sensitivity to the redox reaction of the solution redox couple. The second is the enhancement of probe film functionalisation observed for the probe film model molecule, 6-mercapto-1-hexanol compared with microsquare electrodes. Such surface modification for specific probe layer biosensing and detection is of significance for a wide range of biomedical and other sensing and analytical applications.</p