Novel Microelectromechanical Systems Image Reversal Fabrication Process Based on Robust SU-8 Masking Layers

This paper discusses a novel fabrication process that uses a combination of negative and positive photoresists with positive tone photomasks, resulting in masking layers suitable for bulk micromachining high-aspect ratio microelectromechanical systems (MEMS) devices. MicroChem\u27s negative photoresist Nano™ SU-8 and Clariant\u27s image reversal photoresist AZ 5214E are utilized, along with a barrier layer, to effectively convert a positive photomask into a negative image. This technique utilizes standard photolithography chemicals, equipment, and processes, and opens the door for creating complementary MEMS structures without added fabrication delay and cost. Furthermore, the SU-8 masking layer is robust enough to withstand aggressive etch chemistries needed for fabrication research and development, bulk micromachining high-aspect ratio MEMS structures in silicon substrates, etc. This processing technique was successfully demonstrated by translating a positive photomask to an SU-8 layer that was then utilized as an etching mask for a series of trenches that were micromachined into a silicon substrate. In addition, whereas the SU-8 mask would normally be left in place after processing, a technique utilizing Rohm and Haas Microposit™ S1818 as a release layer has been developed so that the SU-8 masking material can be removed post-etching

“Thank god for Deadspin”:Interlopers, metajournalistic commentary, and fake news through the lens of “journalistic realization”

Interlopers are a class of digital-peripheral journalists and outlets who position their work as journalism, but who have struggled to be recognized as such. While we have long acknowledged journalism’s place online, as digital-peripheral journalists interlopers face challenges when it comes to appreciating their work as news and their contributions as journalism. This article argues their contributions warrant further evaluation as the journalistic field continues to confront change and engage new approaches to journalism, and as interlopers continue to produce news. Using Deadspin’s coverage of the Sinclair Broadcast Group as an exemplar of such contributions, this article details an approach which accounts for interlopers’ unique approaches to news, locating in broader news discourse measures of “journalistic realization” as a legitimating discourse. Its findings tentatively suggest a weakening of historically hardened boundaries between journalism’s core and its periphery, and argue for continued, nuanced exploration of the nature of the journalistic field