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1 research outputs found
Anodic SiO2 for Low Temperature Gate Dielectrics
Author
AG Revesz
AK Ray
+19Â more
BR Lorenzo
BR Lorenzo
EH Nicollian
G Lucovsky
G Mende
G. Mende. K.D. Butter. and B
H Richter
H. Hasegawa. S. Arimoto. J. Nanjo H. Yamamoto. and H. Ohno, J
J Batey
JDE Bloodworth
K Michimori
P.G. Pai. S.S. Chao. Y. Takagi. and G. Lucovsky J. Vac. Sci
PF Schmidt
S Okamoto
S Taylor
S. Kimura. E. Murakami. K. Miyake. T. Warabisako. H. Sunami and T. Tokuyama. J
S. Seki. T. Unagami. and B. Tsujiyama. J
U Sharma
WA Pliskin
Publication venue
'Springer Science and Business Media LLC'
Publication date
01/01/1988
Field of study
No full text
Crossref
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