Radiation-induced melting in coherent X-ray diffractive imaging at the nanoscale

Coherent X-ray diffraction techniques play an increasingly significant role in imaging nanoscale structures which range from metallic and semiconductor samples to biological objects. The conventional knowledge about radiation damage effects caused by ever higher brilliance X-ray sources has to be critically revised while studying nanostructured materials

Roentgenempfindliche Polymere fuer die Mikromechanik

Poly(lactide-co-glycolide) with a lactide/glycolide ratio of 90:10 is proposed as a new efficient roentgen resist for the LIGA process. The newly developed laminate, consisting of this resit material, 500 nm carbon primer layer and an 8 mm thick copper piece, proved to be superior to the standard LIGA laminate. Additional developments in the field of LIGA technique include a novolak-based negative resist for deep-etch synchrotron radiation litography and an external primer for the polymethylmethacrylate standard resist. (WEN)SIGLEAvailable from TIB Hannover: F95B1203+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman